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- Offer Profile
- centrotherm has been
developing and realizing innovative thermal solutions for over 50 years. As
a leading and globally operating technology group, we offer production
solutions for the photovoltaic, semiconductor and microelectronic
industries.
The continuous further development of our successful solutions in thermal
processing and coating, such as for manufacturing crystalline solar cells
and power semiconductors, form the basis for our successful partnerships
with industry, research and development.
Product Portfolio
Photovoltaics
- Diffusion, oxidation and plasma coating processes, as
well as thermal processing of mono and multi-crystalline solar cells are
among the core competencies of centrotherm. Our production systems are being
utilized around the globe and have a proven track record in terms of process
stability and machine availability in the complex mass production of solar
cells. Our vast process expertise, research & development experience, as
well as our in-house cell development also enable us to offer engineering
services, comprehensive process consulting services, technology packages and
even fully integrated production solutions. Our sustainable manufacturing
concepts of today are already designed for tomorrow’s process technology and
can be readily and expediently upgraded. Therefore, it is possible to
integrate new cell concepts, such as our centaurus technology or alternative
coating or laser processes, into existing production lines.
As one of the pioneers in the photovoltaic industry, centrotherm commands
more than 30 years of experience and has established itself as a strong
partner for leading cell manufacturers all over the world. We are
consistently pursuing the objective of reducing the production costs per
watt peak and enabling photovoltaic solutions to successfully compete with
conventional forms of energy generation. Having written a success story that
is truly one-of-a-kind in this market, we have implemented more than 50
turnkey production lines and more than 2000 single process systems, which
means that we possess prominent installed production capacities and a broad
presence on the PV market. DIFFUSION FURNACE
- Tube furnace for diffusion, oxidation and annealing in
c-Si solar cell processing
Processes
Diffusion (POCl3, BBr3, BCl3)
Annealing
Wet and dry Oxidation (optional: DCE, HCl)
Further processes upon request
Low Pressure Diffusion Furnace
- Tube furnace for low pressure diffusion processes
Processes
POCl3 Diffusion
BBr3 Diffusion
PECVD System
- Batch-type system for passivation and nitride coating in
c-Si solar cell processing
Processes
PECVD-Nitride
PECVD-Oxide
PECVD-Oxinitride
Multi-Layer
Further processes upon request
Fast Firing Furnace
- Inline furnace for co-firing and sintering of metallization
Processes
Firing of front side metallization
Alloying of rear side contact
Drying of metallization paste
R&D System
- Batch-type system for R&D c-Si solar cell applications
Processes
Atmospheric
Diffusion | Oxidation | Sintering | Annealing
Low Pressure
Oxide | Nitride | Oxinitride
LPCVD
Polysilicon | Siliziumnitride | Oxide | Oxinitride
FULL PRODUCTION SOLUTIONS
- From planning to start-up to finished solar cell
Our Full Production Solutions program offers you production lines that
have been tailored to your requirements for the production of mono and
multi-crystalline solar cells. The scope of these services comprises the
centrotherm core processes as well as the OEM process systems specified by
us and the respective automation solutions. Thanks to the perfect detailed
coordination of the overall process, we are in a position to guarantee the
key performance parameters, such as solar cell efficiency, production
throughput and yield - in connection with low production costs.
SEMICONDUCTOR
- As one of the leading developers and manufacturers of
production equipment for the semiconductor industry, we offer a broad
spectrum of processes for various technologies and applications, such as
logic and memory devices (e.g. Flash, DRAM), power semiconductors (e.g. Si,
SiC), LED, SMT, MEMS or sensor technology.
- Annealing (e.g. implant annealing, diffusion),
- Formation (e.g. LPCVD, plasma oxidation, RTO)
- Modification (e.g. oxide nitridation and silicide formation) of layers
Our team of highly qualified process engineers devises innovative solutions
for the ever more exacting demands of the industry, which mandate the
availability of electronic components that are becoming increasingly
miniaturized, while offering more functions and higher speed than the
previous generation. Therefore the following equipment is applied:-
Horizontal and vertical batch systems (atmospheric or vacuum processes)
- Single wafer systems (RTP, low-temperature microwave oxidation)
- Vertical high temperature furnaces (annealing up to 2000 °C and
oxidation up to 1350 °C)
Activator 150
- High-temperature furnace for SiC and GaN annealing and
Graphene growth
Process
Annealing
OXIDATOR 150
- High-temperature oxidation furnace
Process
Oxidation
Verticoo 200
- Vertical wafer process system for mass production
Processes
Annealing
Diffusion
LPCVD
Verticoo Mini
- Wafer process system for small-size production and R&D
Processes
Annealing
Oxidation
Diffusion
LPCVD
PECVD
E2000
- Wafer process system for mass production
Processes
Annealing
Oxidation
Diffusion
LPCVD
PECVD
E1550
- Wafer process system for small and middle-size production
Processes
Annealing
Oxidation
Diffusion
LPCVD
PECVD
E1200
- Wafer process system for small-size production and R&D
Processes
Annealing
Oxidation
Diffusion
LPCVD
PECVD
c.PLASMOXLT
- Low temperature microwave plasma oxidation
Processes
Plasma oxidation
Nitridation
In-situ Annealing
c.RAPID200
- Rapid Thermal Processing for compound semiconductor and
silicon
Processes
Ion implant annealing
Silicide formation (Ti, Co, Ni, Pt, etc.)
Oxidation
PSG reflow
Metallization annealing
Further applications
MICROELECTRONICS
- As longtime developer and manufacturer of production
equipment for the microelectronics industry, we offer a broad spectrum of
thermally activated processes for a wide range of technologies and
applications, such as thick film processes or DCB , LTCC, and MLCC
manufacturing:
- Soldering of power semiconductors, optoelectronics and high temperature
components (atmospheric and high pressure)
- Drying and sintering for thick film technologies (DS)
- Firing processes for Low Temperature Cofired Ceramics (LTCC)
- Firing processes for Multi Layer Chip Capacity (MLCC)
- Remelting and connection processes for Direct Copper Bonding (DCB)
Our team of highly qualified process engineers devises innovative solutions
for the ever more exacting demands of the industry, which mandate the
availability of electronic components that are becoming increasingly
miniaturized, while offering more functions and higher speed than the
previous generation:- Oxidizing, reductive and passive process
conditions
- Optimal thermal transition and efficient cooling technology
- Exact and repeatable temperature control thanks to digital
state-of-the-art measuring and control functions
- Particle-free and low-mass transport apparatus for highly sensitive
components
- Temperature ranges from 20 – 2000°C (according to application)
VLO 180 | VLO 300
- Vacuum Soldering Systems for high volume production
Processes
- Advanced Packaging
- Power Semiconductors
- Sealing
- Soldering
Processes
Advanced
Packaging
Power
Semiconductors
Sealing
Soldering
VLO 20
- Vacuum Soldering System for small volume production and R&D
Processes
Advanced Packagingg
Power Semiconductors
Sealing
Soldering
VLO 6 | VLO 12
- Vacuum Soldering Systems for Advanced Packaging and R&D
Processes
Advanced Packaging
Power
Semiconductors
Sealing
Soldering
VLO HP
- High-Pressure Vacuum Soldering System for Advanced
Packaging
Processes
Power Semiconductors
Advanced Packaging
Hybrid Microelectronic Assemblies
Optoelectronic Packaging
Hermetic Package Sealing
Wafer Level Packaging
UHB LED Packaging
MEMS Package Sealing
Conveyor Furnace DO-DS
- Conveyor furnace for serial production and R&D
Processes
Thick film
MLCC
LTCC
DCB
Annealing (100% H2)
Glas/ metal sealing
Customer Service
PHOTOVOLTAICS
- We develop and manufacture highly efficient thermal
process systems that are designed to meet stringent standards with regard to
high availability and productivity. Our customers use our equipment around
the world around the clock and place their trust in its absolute
reliability. In order to be able to continuously guarantee that we meet
these expectations, we have established a global service network that
warrants that you will enjoy first rate services paired with expeditious
response times at all times.
In addition to repair, maintenance and servicing work, we are at your side
as your experienced partner accompanying your production operations and
providing process consulting services and upgrades, training programs as
well as machine refurbishments and relocations.
Semiconductor & Microelectronics
- We provide engineering and process-technology services
for our customers in the semiconductor industry. We continue to support our
clients with service offerings and consulting services after commissioning
and enable the further improvement of existing production systems through
upgrades.
Our services at a glance- Delivery, assembly and commissioning of
production systems on-site
- Training of customer staff in the operation of production systems
- Purchasing of replacement parts required for the continuous
operation of production systems
- Supplementary service offerings and consulting for systems in
ongoing production processes (e.g. remote systems)
- Remote control and maintenance ensures fast analysis and
troubleshooting of system errors
- Optimization of processes and production stages
- Maintenance services
- Retrofittings, refurbishments and upgrades of equipment